✦ LIBER ✦
Alkyl-trichlorosilane monolayer as ultra-thin insulating film for silicon MIS devices
✍ Scribed by D. Vuillaume; P. Fontaine; J. Collet; D. Deresmes; M. Garet; F. Rondelez
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 317 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0167-9317
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