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Alcohol-assisted photoetching of silicon carbide with a femtosecond laser

✍ Scribed by Cunxia Li; Xu Shi; Jinhai Si; Tao Chen; Feng Chen; Shixiong Liang; Zhaoxin Wu; Xun Hou

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 256 KB
Volume: 282
Category: Article
ISSN: 0030-4018
DOI: 10.1016/j.optcom.2008.09.072

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