✦ LIBER ✦
AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
✍ Scribed by N. Kano; S. Hirose; K. Hara; J. Yoshino; H. Munekata; H. Kukimoto
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 367 KB
- Volume
- 82-83
- Category
- Article
- ISSN
- 0169-4332
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