✦ LIBER ✦
Al planarization processes for multilayer metallization of quarter micrometer devices
✍ Scribed by Zheng Xu; Hoa Kieu; Ivo J. Raaijmakers; Avi Tepman
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 750 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0040-6090
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