Al-Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors

✍ Scribed by Seong Keun Kim; Gyu-Jin Choi; Sang Young Lee; Minha Seo; Sang Woon Lee; Jeong Hwan Han; Hyo-Shin Ahn; Seungwu Han; Cheol Seong Hwang

• Book ID: 101417177
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 360 KB
• Volume: 20
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200701085