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Al and Ti secondary neutral and secondary ion emission from oxide samples in the high-frequency sputtering mode of HF-plasma SNMS

✍ Scribed by X. Ai; H. Hutter; M. Gritsch; H. Börner; J. D. Sunderkötter; H. Bubert; H. Jenett


Publisher
Springer
Year
2000
Tongue
English
Weight
575 KB
Volume
366
Category
Article
ISSN
1618-2650

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