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Air Vortices and Nano-Vibration of Aerostatic Bearings

✍ Scribed by Xuedong Chen; Han Chen; Xin Luo; Yixi Ye; Yuantai Hu; Jiaqiang Xu

Book ID
106551607
Publisher
Springer US
Year
2011
Tongue
English
Weight
514 KB
Volume
42
Category
Article
ISSN
1023-8883

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πŸ“œ SIMILAR VOLUMES

Numerical and Experimental Analysis for
Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways
✍ T. Aoyama; Y. Kakinuma; Y. Kobayashi πŸ“‚ Article πŸ“… 2006 πŸ› International Academy for Production Engineering 🌐 English βš– 734 KB

Aerostatic guideways have been used in many fields and are absolutely essential for ultraprecision machining . Recently, with increasing demand for ultraprecision devices, the accuracy of 1nm or less has become necessary. On the other hand, conventional aerostatic guideways are not designed consider