## Abstract A CAD model for an air‐gap‐type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel
Air-gap type TFBAR-based filter topologies
✍ Scribed by Kun-Wook Kim; Gwang-Yong Kim; Jong-Gwan Yook; Han-Kyu Park
- Publisher
- John Wiley and Sons
- Year
- 2002
- Tongue
- English
- Weight
- 91 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
Extremely small bandpass filters with TFBARs using aluminum nitride piezoelectric material have been realized in this study. Resonator modeling has been performed based on the modified Butterworth–Van Dyke (MBVD) model from the measured frequency responses of a single resonator. The predicted filter responses are compared with measured frequency data. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 34: 386–387, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10470
📜 SIMILAR VOLUMES
## Abstract The aim of this paper is to apply a Helmholtz‐type partial differential equation as an alternative to standard density filtering in topology optimization problems. Previously, this approach has been successfully applied as a sensitivity filter. The usual filtering techniques in topology