Air gap formation by UV-assisted decomposition of CVD material

✍ Scribed by M. Pantouvaki; A. Humbert; E. VanBesien; E. Camerotto; Y. Travaly; O. Richard; M. Willegems; H. Volders; K. Kellens; R. Daamen; R.J.O.M. Hoofman; G. Beyer

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 687 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.05.020