[AIP RARIFIED GAS DYNAMICS: Proceedings of the 26th International Symposium on Rarified Gas Dynamics - Kyoto (Japan) (20–25 July 2008)] AIP Conference Proceedings - Direct Simulation Monte Carlo Simulations of Low Pressure Semiconductor Plasma Processing

✍ Scribed by Gochberg, L. A.; Ozawa, T.; Deng, H.; Levin, D. A.; Abe, Takashi

• Book ID: 120068994
• Publisher: AIP
• Year: 2008
• Weight: 995 KB
• Category: Article
• DOI: 10.1063/1.3076614