✦ LIBER ✦
Aging phenomena in heavily doped (p+) micromachined silicon cantilever beams
✍ Scribed by M. Tabib-Azar; K. Wong; Wen Ko
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 916 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0924-4247
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