✦ LIBER ✦
Agglomeration characteristic of particles in alumina slurry by addition of chemicals and milling process for Cu CMP
✍ Scribed by Min-Ho Choi; Nam-Hoon Kim; Jong-Heun Lim; Sang-Yong Kim; Eui-Goo Chang
- Book ID
- 103843261
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 248 KB
- Volume
- 118
- Category
- Article
- ISSN
- 0921-5107
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