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AFM microlithography of a thin chromium film covered with a thin resist Langmuir-Blodgett (LB) film

✍ Scribed by Hajime Takano; Masamichi Fujihira

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
534 KB
Volume
273
Category
Article
ISSN
0040-6090

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