✦ LIBER ✦
AFM Measurements of Adhesion between Actual CMP Slurry Particles and Various Substrates
✍ Scribed by Liu, Yong ;Zdyrko, Bogdan ;Tregub, Alex ;Moinpour, Mansour ;Buehler, Mark ;Luzinov, Igor
- Book ID
- 120575517
- Publisher
- Cambridge University Press
- Year
- 2005
- Weight
- 703 KB
- Volume
- 867
- Category
- Article
- ISSN
- 0272-9172
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