✦ LIBER ✦
AFM investigation of thin post-baked photoresistive films for microsystem technology application
✍ Scribed by S. E. Alexandrov; A. B. Speshilova; Y. V. Soloviev; O. I. Ermeychik
- Book ID
- 111443766
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 184 KB
- Volume
- 41
- Category
- Article
- ISSN
- 1063-7826
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