Aerosol-Assisted Plasma Deposition of Ba
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D. Vangeneugden; S. Paulussen; O. Goossens; R. Rego; K. Rose
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Article
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2005
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John Wiley and Sons
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English
⚖ 411 KB
## Abstract Hybrid organic‐inorganic precursors and sol–gel systems thereof, obtained via wet‐chemical hydrolysis, were atomized and introduced into an atmospheric pressure dielectric barrier discharge (DBD) in nitrogen. The precursors used are tetraethoxysilane (TEOS), glycidoxypropyltrimethoxysil