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Aerogelation Process Simulation by a Cluster-Cluster Aggregation Algorithm

โœ Scribed by Anwar Hasmy


Book ID
110267691
Publisher
Springer
Year
1999
Tongue
English
Weight
97 KB
Volume
15
Category
Article
ISSN
0928-0707

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Cluster ion implantation is a useful technique for manufacturing ultra-shallow-junction. In order to investigate the depth and lateral distribution as well as cluster dissociation, we performed a molecular dynamics simulation that injects 200-500 eV/atom boron cluster into single crystal silicon. Th