Advantageous possibilities, design aspects and technical use of double-ring magnetron sputter sources

✍ Scribed by P. Frach; K. Goedicke; T. Winkler; Chr. Gottfried; H. Walde; W. Hentsch

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 632 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)08224-7