✦ LIBER ✦
Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications
✍ Scribed by S. S. Hullavarad; R. D. Vispute; B. Nagaraj; V. N. Kulkarni; S. Dhar; T. Venkatesan; K. A. Jones; M. Derenge; T. Zheleva; M. H. Ervin; A. Lelis; C. J. Scozzie; D. Habersat; A. E. Wickenden; L. J. Currano; M. Dubey
- Publisher
- Springer US
- Year
- 2006
- Tongue
- English
- Weight
- 643 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0361-5235
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