A comb drive is one of the most important microactuators in Microelectromechanical (MEM) systems. In a standard comb drive, the capacitance varies linearly with displacement, resulting in an electrostatic driving force which is independent of the position of the moving ÿngers (relative to the ÿxed o
Advances in computational design and optimization with application to MEMS
✍ Scribed by Bing-Chung Chen; Emílio C. N. Silva; Noboru Kikuchi
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 891 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0029-5981
- DOI
- 10.1002/nme.271
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