✦ LIBER ✦
Advanced submicron research and technology development at the national submicron facility : Edward D. Wolf and Thomas E. Everhart. Proc. IEEE71 (5) 589 (May 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 114 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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