Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average

✍ Scribed by Hyo-Heon Ko, Jihyun Kim, Sang-Hoon Park, Jun-Geol Baek, Sung-Shick Kim

• Book ID: 113069694
• Publisher: Springer US
• Year: 2010
• Tongue: English
• Weight: 617 KB
• Volume: 23
• Category: Article
• ISSN: 0956-5515
• DOI: 10.1007/s10845-010-0383-6