Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

✍ Scribed by Hasper, A.; Oosterlaken, E.; Huussen, F.; Claasen-Vujcic, T.

• Book ID: 117878474
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 575 KB
• Volume: 19
• Category: Article
• ISSN: 0272-1732
• DOI: 10.1109/40.798107