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Advanced Interconnects for ULSI Technology (Baklanov/Advanced Interconnects for ULSI Technology) || Electrical Breakdown in Advanced Interconnect Dielectrics

✍ Scribed by Baklanov, Mikhail R.; Ho, Paul S.; Zschech, Ehrenfried

No coin nor oath required. For personal study only.

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Advanced Interconnects for ULSI Technolo

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✍ Baklanov, Mikhail R.; Ho, Paul S.; Zschech, Ehrenfried 📂 Article 📅 2012 🏛 John Wiley & Sons, Ltd ⚖ 126 KB