✦ LIBER ✦
Advanced i-line lithography: processes for positive and negative patterning using the same acid hardening resist
✍ Scribed by G. Amblard; A. Weill; C. Stauffer
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 443 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.