✦ LIBER ✦
Adsorption of Cationic Surfactants onto Photoresist Surfaces—A Way to Reduce Pattern Collapse in High Aspect Ratio Patterning
✍ Scribed by A. Drechsler; N. Petong; C. Bellmann; A. Synytska; P. Busch; M. Stamm; K. Grundke; O. Wunnicke
- Book ID
- 102095683
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 254 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0008-4034
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