✦ LIBER ✦
Adsorption and surface diffusion of silicon growth species in silicon carbide chemical vapour deposition processes studied by quantum-chemical computations
✍ Scribed by Kalered, Emil; Pedersen, Henrik; Janzén, Erik; Ojamäe, Lars
- Book ID
- 121604202
- Publisher
- Springer
- Year
- 2013
- Tongue
- English
- Weight
- 846 KB
- Volume
- 132
- Category
- Article
- ISSN
- 1432-2234
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