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Adsorption and decomposition studies of t-butyl silane on Si(100)-(2 × 1) surfaces using FTIR-ATR spectroscopy

✍ Scribed by E. Rudkevich; D. Saulys; D. Gaines; T.F. Kuech; L. McCaughan


Book ID
117217449
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
650 KB
Volume
383
Category
Article
ISSN
0039-6028

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