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Adsorption and decomposition of triethylphosphine (TEP) and tertiarybutylphosphine (TBP) on Si(001) studied by XPS, HREELS, and TPD

โœ Scribed by G. Kaneda; J. Murata; T. Takeuchi; Y. Suzuki; N. Sanada; Y. Fukuda


Book ID
108418417
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
401 KB
Volume
113-114
Category
Article
ISSN
0169-4332

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