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Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists
✍ Scribed by J.-B Kim; H.-J Yun; Y.-G Kwon; B.-W Lee
- Book ID
- 108366110
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 714 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0032-3861
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