✦ LIBER ✦
Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO2 surface
✍ Scribed by Jahyun Yang; Kyungtaek Im; Sangwoo Lim
- Book ID
- 103820400
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 548 KB
- Volume
- 257
- Category
- Article
- ISSN
- 0169-4332
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