✦ LIBER ✦

Adaptive control to a dry etch process by microcomputer

✍ Scribed by H. Boehm

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 889 KB
Volume: 18
Category: Article
ISSN: 0005-1098
DOI: 10.1016/0005-1098(82)90055-3

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Run-to-run process control of a plasma e

Run-to-run process control of a plasma etch process with neural network modelling

✍ Jill P. Card; Mark Naimo; William Ziminsky 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 250 KB 👁 2 views

Run-to-run control of a plasma etch process for 8 inch diameter silicon wafers at Digital Semiconductor is determined by maintenance of targeted values of post-etch metrology variables. The post-etch quality variables are extremely sensitive to variation in the etch chamber conditions due to fluctua

Improving the medical record for clinica

Improving the medical record for clinical oncology research by adaptation to a microcomputer

✍ Dearth, Jim ;Brown, Nancy ;Hiett, Tee 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 421 KB

Adaptive model-following control of a ce

Adaptive model-following control of a certain class of non-linear process unit. Application to a continuous periodic reactor

✍ G.E. Eliçabe; G.L. Frontini; G.R. Meira 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 818 KB

Adaptive control processes—A guided tour

Adaptive control processes—A guided tour, by Richard Bellman, Princeton University Press, Princeton, New Jersey, 1961, 255 pp., $6.50

✍ R. H. Wilcox 📂 Article 📅 1961 🏛 John Wiley and Sons 🌐 English ⚖ 110 KB

Window consensus PCA for multiblock stat

Window consensus PCA for multiblock statistical process control: adaption to small and time-dependent normal operating condition regions, illustrated by online high performance liquid chromatography of a three-stage continuous process

✍ Diana L. S. Ferreira; Sila Kittiwachana; Louise A. Fido; Duncan R. Thompson; Ric 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 912 KB

[Adaptive and Learning Systems for Signa

[Adaptive and Learning Systems for Signal Processing, Communications, and Control] Intelligent Image Processing || Appendix D: How to Build a Covert Computer Imaging System into Ordinary Looking Sunglasses

✍ Mann, Steve 📂 Article 📅 2001 🏛 John Wiley & Sons, Inc. ⚖ 167 KB 👁 2 views