✦ LIBER ✦

Adaptation of silicon manufacturing technology to compounds

✍ Scribed by Mark Telford

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 457 KB
Volume: 14
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(01)80264-7

No coin nor oath required. For personal study only.

✦ Synopsis

We look at how chip makers and equipment suppliers have adopted manufacturing technology from the silicon industry as the compound semiconductor industry has matured, production throughputs have increased, and yield requirements have risen.

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