Nitrogen atoms in ArξΈN2 flowing microwav
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A. Ricard; J. Deschamps; J.L. Godard; L. Falk; H. Michel
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Article
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1991
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Elsevier Science
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English
β 471 KB
High nitrogen atom densities (10~5-10 " cm-3) have been produced in high pressure (20-760 Torr) Ar-N~ flowing post-discharges. Gas ionization is performed by 2.45 GHz surfatron and surfaguide exciters with 100-200 W transmitted power. Nitrogen atoms have been measured by NO titration and by the abso