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Active pixel sensors on high-resistivity silicon and their readout

โœ Scribed by Chen, W.; De Geronimo, G.; Li, Z.; O'Connor, P.; Radeka, V.; Rehak, P.; Smith, G.C.; Yu, B.


Book ID
126690667
Publisher
IEEE
Year
2002
Tongue
English
Weight
283 KB
Volume
49
Category
Article
ISSN
0018-9499

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## Abstract In this work, integration on the same chip of porous silicon gas sensors along with their driving/readout electronic circuits by using an industrial microelectronic process is demonstrated. To ensure maximum compatibility, the porous silicon formation is performed after the integrated c