Activation of mobile ions in SiO2 films caused by substrate heating during electron beam evaporation of aluminium

✍ Scribed by R.S. Petrova; R.D. Stoeva

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 148 KB
• Volume: 124
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(85)90262-7