[ACS Symposium Series] Surface Science Investigations in Tribology Volume 485 (Experimental Approaches) || Kinetics of Damage Generation on Single-Crystal Silicon Surfaces

✍ Scribed by Chung, Yip-Wah; Homola, A. M.; Street, G. Bryan

• Book ID: 111965732
• Publisher: American Chemical Society
• Year: 1992
• Weight: 831 KB
• Category: Article
• ISBN-13: 9780841213418
• DOI: 10.1021/bk-1992-0485.ch014