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Acoustic instabilities in thin polymer films

✍ Scribed by E. Schäffer; U. Steiner

Book ID
111631714
Publisher
Springer-Verlag
Year
2002
Tongue
English
Weight
162 KB
Volume
8
Category
Article
ISSN
1292-8941

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## Abstract Nanomachining of thin polymer resist films with an atomic force microscope (AFM) is a promising route for the fabrication of nanoscale devices. In order to enhance the controllability of the nanomachining process an in‐plane acoustic wave is coupled to the sample support. This enhances