Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

✍ Scribed by Paul Brabant; Jianqing Wen; Joe Italiano; Trevan Landin; Nyles Cody; Lee Haen

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 198 KB
• Volume: 224
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2003.08.105