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Accurate simulation of turbomolecular pumps with modified algorithm by 3D direct simulation Monte Carlo method

โœ Scribed by Li, Yanwu; Chen, Xuekang; Guo, Wenjin; Li, Danming; Wang, Qiangfeng; Feng, Kai


Book ID
122152963
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
992 KB
Volume
109
Category
Article
ISSN
0042-207X

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