✦ LIBER ✦

Accurate monitoring of dielectric film thickness

✍ Scribed by OS Heavens; GJ Kopek; Yuan Yi-Fang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Michelson interferometer for monitoring

✍ V.V. Shah 📂 Article 📅 1970 🏛 Elsevier Science 🌐 English ⚖ 140 KB

Film thickness monitor

📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 145 KB

Film thickness monitor

📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 160 KB

Vacuum film-thickness monitor

✍ Heraeus-Engelhard Vacuum Incorporated USA 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 265 KB

Digital film thickness monitor

✍ Airco-Temescal a Division of Air Reduction Co Inc. 📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 145 KB

More film thickness monitors

✍ Granville-Phillips Co 📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 254 KB