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Accurate microscopic method to investigate the aging of micromachined silicon actuators

✍ Scribed by R.A. Buser; A. Dommann

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 753 KB
Volume: 43
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(93)00702-6

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