Accurate measurement of pressure differences and the effect of baffle on pressure distribution in vacuum chamber during dynamic gas flow

✍ Scribed by Wakil Khan; I.M. Choi; J.Y. Lim; S.S. Hong

• Book ID: 108079251
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 721 KB
• Volume: 10
• Category: Article
• ISSN: 1567-1739
• DOI: 10.1016/j.cap.2009.07.016