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Accurate heterodyne interferometric ellipsometer

✍ Scribed by L.R. Watkins

Book ID
103875266
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
239 KB
Volume
48
Category
Article
ISSN
0143-8166

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Error analysis of a simple and accurate
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✍ Nee, Soe-Mie F. ;Yu, Chih-Jen ;Wu, Jheng-Syong ;Huang, Hong-Sheng ;Chou, Chien πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 430 KB

## Abstract The polarization modulation of optical coherent ellipsometry (OCE) is provided by the coupling between two highly correlated orthogonal polarizations with slightly different frequencies. Error of the sample‐analyzer (SA) OCE is analyzed using the Stokes–Mueller formalism to include samp