Accuracy of digital Fourier transformation detection systems for high speed rotating analyser ellipsometers

✍ Scribed by K. Riedling

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 645 KB
• Volume: 155
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90461-5