Accuracy Enhancement Technologies for Micromachining Processes (Lecture Notes in Mechanical Engineering)

✍ Scribed by Golam Kibria (editor), B. Bhattacharyya (editor)

• Publisher: Springer
• Year: 2020
• Tongue: English
• Leaves: 221
• Edition: 1st ed. 2020
• Category: Library

✦ Synopsis

This book bridges the gap between the demand for micro-featured components on the one hand, and successful micromachining of miniature products on the other. In addition to covering micromachining in the broader sense, it specifically addresses novel machining strategies implemented in various advanced micromachining processes to improve machining accuracy, energy consumption, component durability, and miniature-scale applicability. The book’s main goal is to present the capabilities of advanced micromachining processes in terms of miniature product manufacturing by highlighting various innovative machining strategies that can be used to augment the production scale and precision alike.

✦ Table of Contents

Preface
Acknowledgements
Contents
Editors and Contributors
Accuracy Improvement in Tool-Based Micromachining
1 Introduction
1.1 Accuracy Improvement
2 Tool-Based Micromachining
2.1 Micro Turning
2.2 Micro Drilling
2.3 Micro Milling
3 Process Criteria
4 Cutting Tool
4.1 Tool Fabrication
4.2 Tool Geometry
4.3 Tool Wear
4.4 Coating of Tool
4.5 Tool Deflection and Failure
5 Machining Parameters
5.1 Built-Up Edge Effects
5.2 Cutting Temperature
5.3 Cutting Fluids
6 Workpiece Characteristics
6.1 Material Structure
7 Cutting Phenomenon
7.1 Size Effect
7.2 Cutting Force
7.3 Heat Generation
7.4 Burr Formation
8 Plant Factors
9 Machine Tool Characteristics
9.1 Position Measurement and Process Monitoring
9.2 Vibration
10 Current and Future Challenges
10.1 Future Challenge
References
Strategies for Improving Performance of Ultrasonic Micromachining Process
1 Introduction
2 Basic Principle of Ultrasonic Micromachining (USMM) Process
3 Types of Ultrasonic Micromachining (USMM) Process
3.1 Stationary Ultrasonic Micromachining (USMM)
3.2 Rotary Ultrasonic Micromachining (RUSMM)
4 Strategies for Development of Ultrasonic Micromachining (USMM) System for Performance Improvement
4.1 Strategies for Stationary Ultrasonic Micromachining (USMM)
4.2 Strategies for Rotary Ultrasonic Micromachining (RUSMM)
5 Mode of Operation of Ultrasonic Micromachining (USMM)
5.1 USMM with Tool Vibration
5.2 USMM with Workpiece Vibration
6 Elements of USMM System
6.1 Power Supply
6.2 Transducer
6.3 Horn
6.4 Abrasive Slurry
6.5 Micro-Tool
6.6 Workpiece
7 Improvement in Machining Rate of Ultrasonic Micromachining (USMM)
7.1 Stationary Ultrasonic Micromachining (USMM)
7.2 Rotary Ultrasonic Micromachining (RUSMM)
8 Improvement in Geometrical Features of Ultrasonic Micromachining (USMM)
8.1 Stationary Ultrasonic Micromachining (USMM)
8.2 Rotary Ultrasonic Micromachining (RUSMM)
9 Future Scope of Research
10 Summary
References
Accuracy Improvement and Precision Measurement on Micro-EDM
1 Introduction
2 Process Mechanism of Micro Electrical Discharge Machining (µEDM)
2.1 Machining Parameters
2.2 Machine Setup Parameters
3 Different Variants of Micro Electrical Discharge Machining
3.1 Micro Wire Electrical Discharge Grinding (µWEDG)
3.2 Block Micro Electrical Discharge Grinding (B-µEDG)
3.3 Micro Electrical Discharge Drilling (µED-Drilling)
3.4 Reverse Micro Electrical Discharge Machining (R-µEDM)
3.5 Drilling with in Situ Fabricated Tool
3.6 Micro Electrical Discharge Milling (µED-Milling)
4 Dimensional Accuracy and Precision Measurement
4.1 Micro-rods
4.2 Micro Holes
4.3 Micro Slots
5 State of the Art of µEDM
5.1 Micro Wire Electrical Discharge Grinding (µWEDG)
5.2 Block Micro Electrical Discharge Machining (B-µEDG)
5.3 Micro Electrical Discharge Drilling (µED-Drilling)
5.4 Reverse Micro Electrical Discharging Machining (R-µEDM)
5.5 Drilling with In Situ Fabricated Tool
5.6 Micro Electrical Discharge Milling (µED-Milling)
6 Summary
References
Improvement of Profile Accuracy in WEDM—A Novel Technique
1 Introduction
2 Wire Deflection and Its Impact on Workpiece Accuracy
3 Development of a New Method for Determination of WireLag and Gap Force
4 Summary
References
Laser-based Fabrication of Micro-channels
1 Introduction
2 Fabrication of Micro-channels
3 Laser-based Fabrication of Micro-channels
3.1 Overview and Process Fundamentals
3.2 Improvement of Quality and Accuracy
4 Underwater Laser Micro-channeling
4.1 Overview and Process Fundamentals
4.2 Improvement of Quality and Accuracy
4.3 An Experimental Case Study
5 Summary
References
Pulsed Nd:YAG Laser Cutting: Accuracy Improvement and Parametric Influences
1 Introduction
2 Pulsed Nd:YAG Laser
2.1 Process and Performance Parameters
3 Pulsed Nd:YAG Laser Cutting of Metals
4 Pulsed Nd:YAG Laser Cutting of Non-metals
5 Pulsed Nd:YAG Laser Cutting of Composites
6 Applications of Artificial Intelligence in Pulsed Nd:YAG Laser Cutting
7 Summary
References
Improvement in Surface Finish and Geometrical Accuracy by Laser Micro-turning
1 Introduction
2 Problems of Micro-turning of Ceramics
3 Laser Micro-turning Process
4 Materials, Machine, Method and Measurement Schemes
5 Results and Discussion
5.1 Investigation of Overlap Factors on Performance Criteria
5.2 Investigation of Laser Defocusing on Machining Performance
6 Assessments of Machined Images Taken in Precision Microscope
7 Summary
References
Accuracy Improvement Techniques in Electrochemical Micromachining (EMM)
1 Introduction
2 Design of Microtools
3 Electrolyte Circulation
4 Microtool Insulation
5 Microsparks Phenomena in EMM
6 IEG Control Strategy
7 Machining Strategy
8 Selection of Combined Process Parameters
9 Hybrid EMM Processes
10 Summary
References
Surface Micromachining—Advances and Advanced Characterization Techniques
1 Introduction
2 Photolithography
2.1 Accuracy Enhancement in Photolithography
2.2 Applications of Photolithography
3 Reactive Ion Etching
3.1 Accuracy Enhancement in Reactive Ion Etching
3.2 Applications of Reactive Ion Etching
4 Deep Reactive Ion Etching Process
4.1 Accuracy Enhancement of DRIE
4.2 Applications of Deep Reactive Ion Etching
5 Focused Ion Beam Fabrication
5.1 Accuracy Enhancement in FIB
5.2 Applications of FIB
6 Electron Beam Lithography
6.1 Accuracy Enhancement in EBL
6.2 Applications of EBL
7 Advanced Characterization Methods
7.1 Stereo Zoom Microscope
7.2 Scanning Electron Microscopy
7.3 Scanning Tunneling Microscopy
8 Summary
References
Generation of Nano-Level Surface Finish by Advanced Nano-Finishing Processes
1 Introduction
2 Abrasive Flow Finishing (AFF)
3 Elastic Emission Finishing (EEF)
4 Magnetic Abrasive Finishing (MAF)
5 Magnetorheological Finishing (MRF)
5.1 Magnetorheological Abrasive Flow Finishing (MRAFF)
5.2 Ball End MR Finishing (MRF) Process
5.3 Magnetic Field-Assisted Finishing (MFAF) Process
6 Chemical Mechanical Polishing (CMP) Process
7 Summary
References