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Accuracy Assessment for Measuring Surface Figures of Large Aspheric Mirrors

โœ Scribed by Kim, Young-Soo; Ahn, Ki-Beom; Park, Kwi-Jong; Moon, Il-Kweon; Yang, Ho-Soon

Book ID
115400439
Publisher
Korean Journal of Optics and Photonics
Year
2009
Tongue
English
Weight
557 KB
Volume
13
Category
Article
ISSN
1226-4776

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We propose an optical profilometer system for evaluating mirrors that are used for hard X-ray nanofocusing. A surface metrology system designed for these mirrors to focus to a size of 10 nm is required to ensure a precise measurement of a large curvature with a vertical accuracy of 1 nm and a latera