✦ LIBER ✦
Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique
✍ Scribed by Mohamed Shaker Salem; Chia-Lung Lee; Shigeru Ikeda; Michio Matsumura
- Book ID
- 108180957
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 722 KB
- Volume
- 210
- Category
- Article
- ISSN
- 0924-0136
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