AC equivalent circuits of thick film humidity sensors
✍ Scribed by K Nitsch; B.W. Licznerski; H Teterycz; L.J. Golonka; K Wiśniewski
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 585 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.
✦ Synopsis
The AC equivalent circuits of thick film humidity sensors are presented. The active layers are based on ZnO-TiO,-Cr,O, ceramics. The compositions contain L&O, B,O, and Si additives. Using the impedance spectroscopy analysis it is possible to construct equivalent circuits of sensors. Elements of these circuits represent the different conduction and polarisation mechanisms existing in the analysed sensors. The influence of technological and construction parameters on electrical properties of sensors can be evaluated as well.
📜 SIMILAR VOLUMES
For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair compari
Resistive oxygen sensors based on SrTiO, show a reproducible change in the sensor resistance as a function of the oxygen partial pressure (PO,) of the atmosphere surrounding them. The sensor's response behaviour after a step in p02 is determined by two consecutive processes, the transfer reactions o