Absolute quantitative time resolved voltage measurements on 1 μm conducting lines of integrated circuits via electric force microscope-(EFM-) testing

✍ Scribed by J. Bangert; E. Kubalek

• Book ID: 108362232
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 295 KB
• Volume: 37
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/s0026-2714(97)00114-5